EUV lithography
E198143
UNEXPLORED
EUV lithography is an advanced semiconductor manufacturing technique that uses extremely short-wavelength ultraviolet light to create ultra-fine patterns on microchips, enabling the production of cutting-edge integrated circuits.
Observed surface forms (2)
| Surface form | Occurrences |
|---|---|
| EUV lithography systems | 1 |
| Extreme ultraviolet lithography | 1 |
Referenced by (3)
Full triples — surface form annotated when it differs from this entity's canonical label.
subject surface form:
ASML
this entity surface form:
Extreme ultraviolet lithography
subject surface form:
ASML
this entity surface form:
EUV lithography systems
subject surface form:
Fresnel zone plate