Triple
T3384238
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | ASML |
E71257
|
entity |
| Predicate | coreTechnology |
P19268
|
FINISHED |
| Object | Extreme ultraviolet lithography |
E198143
|
NE FINISHED |
How this triple was built (2 steps)
Every LLM step that produced this triple, in pipeline order — named-entity classification, the disambiguation choices (the exact options shown, with the pick highlighted), and the generated description. The batch + timestamp of each is in the Provenance table below.
NER
Named-entity recognition
gpt-5-mini
Instruction
Given a phrase, classify it is english named entity (e.g., persons, organizations, works of art) in Latin script, or not (e.g., literals, dates, URLs, verbose phrases). For disambiguation, the statement where the phrase occurs as object is also given. Please return a JSON object with `phrase` (string, the phrase being analyzed) and `is_ne` (boolean, indicating whether the phrase is a Named Entity).
Input
Phrase: Extreme ultraviolet lithography | Statement: [ASML, coreTechnology, Extreme ultraviolet lithography]
NED1
Entity disambiguation (via context triple)
gpt-5-mini-2025-08-07
Target entity: Extreme ultraviolet lithography Context triple: [ASML, coreTechnology, Extreme ultraviolet lithography]
-
A.
EUV lithography
chosen
EUV lithography is an advanced semiconductor manufacturing technique that uses extremely short-wavelength ultraviolet light to create ultra-fine patterns on microchips, enabling the production of cutting-edge integrated circuits.
-
B.
dip-pen nanolithography
Dip-pen nanolithography is a scanning probe-based nanofabrication technique that uses an atomic force microscope tip to directly "write" nanoscale patterns of molecules onto a substrate with high precision.
-
C.
Fresnel zone plates
Fresnel zone plates are diffractive optical elements composed of concentric rings that focus light through interference rather than refraction, serving as lens alternatives in applications like X-ray and microscopy.
-
D.
Light-Space Modulator
Light-Space Modulator is an experimental kinetic sculpture by László Moholy-Nagy that explores movement, light, and shadow through rotating metal and glass forms.
-
E.
Extreme Ultraviolet Imager
The Extreme Ultraviolet Imager is a solar telescope instrument that captures high-resolution images of the Sun’s outer atmosphere in extreme ultraviolet wavelengths to study its structure and dynamics.
- F. None of above.
- G. Unsure - the case is ambiguous/there is not enough information to decide.
Provenance (3 batches)
The batch behind each pipeline step, in order, with when it ran. Timestamps are batch-level — stages were processed in waves, so the object chain (NER → NED1 → NEDg → NED2) reads in order, but predicate / elicitation batches can sit in a different wave.
| Step | Stage | Batch ID | Status | When |
|---|---|---|---|---|
| creating | Elicitation | batch_69ad85a8fd9c819095ecedf838d2bf1b |
completed | March 8, 2026, 2:20 p.m. |
| NER | Named-entity recognition | batch_69adb5ec85d08190b28110157c39435f |
completed | March 8, 2026, 5:46 p.m. |
| NED1 | Entity disambiguation (via context triple) | batch_69b33452d79081909bf6955289e0dece |
completed | March 12, 2026, 9:46 p.m. |
Created at: March 8, 2026, 3:14 p.m.