Triple
T3384234
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | ASML |
E71257
|
entity |
| Predicate | hasProduct |
P3585
|
FINISHED |
| Object | EUV lithography systems |
E198143
|
NE FINISHED |
How this triple was built (2 steps)
Every LLM step that produced this triple, in pipeline order — named-entity classification, the disambiguation choices (the exact options shown, with the pick highlighted), and the generated description. The batch + timestamp of each is in the Provenance table below.
NER
Named-entity recognition
gpt-5-mini
Instruction
Given a phrase, classify it is english named entity (e.g., persons, organizations, works of art) in Latin script, or not (e.g., literals, dates, URLs, verbose phrases). For disambiguation, the statement where the phrase occurs as object is also given. Please return a JSON object with `phrase` (string, the phrase being analyzed) and `is_ne` (boolean, indicating whether the phrase is a Named Entity).
Input
Phrase: EUV lithography systems | Statement: [ASML, hasProduct, EUV lithography systems]
NED1
Entity disambiguation (via context triple)
gpt-5-mini-2025-08-07
Target entity: EUV lithography systems Context triple: [ASML, hasProduct, EUV lithography systems]
-
A.
EUV lithography
chosen
EUV lithography is an advanced semiconductor manufacturing technique that uses extremely short-wavelength ultraviolet light to create ultra-fine patterns on microchips, enabling the production of cutting-edge integrated circuits.
-
B.
dip-pen nanolithography
Dip-pen nanolithography is a scanning probe-based nanofabrication technique that uses an atomic force microscope tip to directly "write" nanoscale patterns of molecules onto a substrate with high precision.
-
C.
Lam Research
Lam Research is a leading American semiconductor equipment company that supplies wafer fabrication tools and services to chip manufacturers worldwide.
-
D.
Light-Space Modulator
Light-Space Modulator is an experimental kinetic sculpture by László Moholy-Nagy that explores movement, light, and shadow through rotating metal and glass forms.
-
E.
Semiconductor Equipment & Materials
Semiconductor Equipment & Materials is an industry segment that provides the specialized machinery, tools, and raw materials used to manufacture semiconductor devices and integrated circuits.
- F. None of above.
- G. Unsure - the case is ambiguous/there is not enough information to decide.
Provenance (3 batches)
The batch behind each pipeline step, in order, with when it ran. Timestamps are batch-level — stages were processed in waves, so the object chain (NER → NED1 → NEDg → NED2) reads in order, but predicate / elicitation batches can sit in a different wave.
| Step | Stage | Batch ID | Status | When |
|---|---|---|---|---|
| creating | Elicitation | batch_69ad85a8fd9c819095ecedf838d2bf1b |
completed | March 8, 2026, 2:20 p.m. |
| NER | Named-entity recognition | batch_69adb5ec85d08190b28110157c39435f |
completed | March 8, 2026, 5:46 p.m. |
| NED1 | Entity disambiguation (via context triple) | batch_69b33452d79081909bf6955289e0dece |
completed | March 12, 2026, 9:46 p.m. |
Created at: March 8, 2026, 3:14 p.m.