Triple
T8399827
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV lithography |
E198143
|
entity |
| Predicate | firstHighVolumeManufacturingUse |
P81076
|
FINISHED |
| Object | around 2019 |
—
|
LITERAL FINISHED |
Provenance (3 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69ca82f816bc8190ab321c07d72208c1 |
elicitation | completed |
| NER | batch_69cb824bfcbc8190b26bfcb5f8c4777c |
ner | completed |
| PD | batch_69cb70d24b248190a326aa6804f942b5 |
pd | completed |
Created at: March 30, 2026, 6:04 p.m.