Triple
T1784113
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | Fresnel zone plate |
E39351
|
entity |
| Predicate | usedFor |
P98
|
FINISHED |
| Object |
EUV lithography
EUV lithography is an advanced semiconductor manufacturing technique that uses extremely short-wavelength ultraviolet light to create ultra-fine patterns on microchips, enabling the production of cutting-edge integrated circuits.
|
E198143
|
NE FINISHED |
Provenance (5 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69a88630519c8190a17addd83c4a3ef4 |
elicitation | completed |
| NER | batch_69aa64e5f5588190ac285d0923c5a2e9 |
ner | completed |
| NED1 | batch_69ada9a1aa8481908cbcecde85804461 |
ned_source_triple | completed |
| NED2 | batch_69adaeb20390819098bad8951ec00d00 |
ned_description | completed |
| NEDg | batch_69adab05cf6c81909f4713664f508ad9 |
nedg | completed |
Created at: March 4, 2026, 7:31 p.m.