Triple
T8399846
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV lithography |
E198143
|
entity |
| Predicate | industryStandardWavelength |
P8547
|
FINISHED |
| Object | 13.5 nm EUV line |
—
|
LITERAL FINISHED |
How this triple was built (2 steps)
Every LLM step that produced this triple, in pipeline order — named-entity classification, the disambiguation choices (the exact options shown, with the pick highlighted), and the generated description. The batch + timestamp of each is in the Provenance table below.
NER
Named-entity recognition
gpt-5-mini
Instruction
Given a phrase, classify it is english named entity (e.g., persons, organizations, works of art) in Latin script, or not (e.g., literals, dates, URLs, verbose phrases). For disambiguation, the statement where the phrase occurs as object is also given. Please return a JSON object with `phrase` (string, the phrase being analyzed) and `is_ne` (boolean, indicating whether the phrase is a Named Entity).
Input
Phrase: 13.5 nm EUV line | Statement: [EUV lithography, industryStandardWavelength, 13.5 nm EUV line]
PD
Predicate disambiguation
gpt-5-mini-2025-08-07
Target predicate: industryStandardWavelength Context triple: [EUV lithography, industryStandardWavelength, 13.5 nm EUV line]
-
A.
supportsWavelengthRange
Indicates that an entity is capable of operating over, handling, or being compatible with a specified range of wavelengths.
-
B.
wavelengthRangeLowerBoundMicrometers
Indicates the minimum wavelength value, expressed in micrometers, that defines the lower limit of a wavelength range for the related entity or measurement.
-
C.
wavelengthDependence
Indicates that one quantity or effect varies as a function of the wavelength of radiation or a wave.
-
D.
industryStandardFor
chosen
Indicates that something is widely accepted or recognized as the conventional or benchmark practice, specification, or norm within a particular industry.
-
E.
primaryWavelength
Indicates the main or dominant wavelength associated with an entity, such as the principal wavelength at which it emits, reflects, or operates.
- F. None of above.
Provenance (3 batches)
The batch behind each pipeline step, in order, with when it ran. Timestamps are batch-level — stages were processed in waves, so the object chain (NER → NED1 → NEDg → NED2) reads in order, but predicate / elicitation batches can sit in a different wave.
| Step | Stage | Batch ID | Status | When |
|---|---|---|---|---|
| creating | Elicitation | batch_69ca82f816bc8190ab321c07d72208c1 |
completed | March 30, 2026, 2:04 p.m. |
| NER | Named-entity recognition | batch_69cb824bfcbc8190b26bfcb5f8c4777c |
completed | March 31, 2026, 8:14 a.m. |
| PD | Predicate disambiguation | batch_69cb70d24b248190a326aa6804f942b5 |
completed | March 31, 2026, 6:59 a.m. |
Created at: March 30, 2026, 6:04 p.m.