Triple
T8399798
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV lithography |
E198143
|
entity |
| Predicate | instanceOf |
P0
|
FINISHED |
| Object | semiconductor manufacturing process |
C24281
|
CONCEPT FINISHED |
How this triple was built (1 step)
Every LLM step that produced this triple, in pipeline order — named-entity classification, the disambiguation choices (the exact options shown, with the pick highlighted), and the generated description. The batch + timestamp of each is in the Provenance table below.
CD
Concept disambiguation
gpt-5-mini-2025-08-07
Target class: semiconductor manufacturing process Context triple: [EUV lithography, instanceOf, semiconductor manufacturing process]
-
A.
semiconductor manufacturing facility
A semiconductor manufacturing facility is a highly controlled industrial plant where raw silicon wafers are processed through complex, precise, and cleanroom-based fabrication steps to produce integrated circuits and microchips.
-
B.
integrated circuit technology
Integrated circuit technology is the design and fabrication of miniaturized electronic circuits on semiconductor chips, enabling complex, high-speed, and low-power electronic systems.
-
C.
microelectronics technology
Microelectronics technology is the field focused on designing, fabricating, and integrating extremely small electronic components and circuits—such as transistors, diodes, and integrated circuits—on semiconductor substrates to enable compact, high-performance electronic systems.
-
D.
semiconductor engineer
A semiconductor engineer designs, develops, and optimizes microelectronic devices and integrated circuits by applying principles of materials science, electrical engineering, and manufacturing processes.
-
E.
computer chip
A computer chip is a small, integrated electronic circuit composed of microscopic components that processes and stores data to perform computational tasks within electronic devices.
- F. None of above. chosen
Provenance (1 batch)
The batch behind each pipeline step, in order, with when it ran. Timestamps are batch-level — stages were processed in waves, so the object chain (NER → NED1 → NEDg → NED2) reads in order, but predicate / elicitation batches can sit in a different wave.
| Step | Stage | Batch ID | Status | When |
|---|---|---|---|---|
| creating | Elicitation | batch_69ca82f816bc8190ab321c07d72208c1 |
completed | March 30, 2026, 2:04 p.m. |
Created at: March 30, 2026, 6:04 p.m.