MTL

E419436

MTL is a research and teaching facility at MIT focused on micro- and nanotechnology, including microelectronics, MEMS, and related advanced fabrication.

All labels observed (1)

Label Occurrences
MTL canonical 1

How this entity was disambiguated

Statements (49)

Predicate Object
instanceOf academic research center ⓘ
research laboratory ⓘ
teaching facility ⓘ
acronymFor Microsystems Technology Laboratories ⓘ
affiliatedWith Massachusetts Institute of Technology ⓘ
associatedWithDepartment Department of Electrical Engineering and Computer Science ⓘ
surface form: MIT Department of Electrical Engineering and Computer Science

MIT Department of Materials Science and Engineering ⓘ
MIT Department of Mechanical Engineering ⓘ
country United States of America ⓘ
surface form: United States
field applied physics ⓘ
electrical engineering ⓘ
materials science ⓘ
focusesOn MEMS ⓘ
advanced fabrication ⓘ
microelectronics ⓘ
microtechnology ⓘ
nanotechnology ⓘ
fullName MIT Microsystems Technology Laboratories ⓘ
goal advance micro- and nanoscale engineering ⓘ
enable interdisciplinary microsystems research ⓘ
hasFacilityType shared experimental facility ⓘ
user facility ⓘ
locatedIn Cambridge, Massachusetts ⓘ
provides cleanroom facilities ⓘ
device characterization facilities ⓘ
microfabrication tools ⓘ
nanofabrication tools ⓘ
researchArea RF and microwave devices ⓘ
actuators ⓘ
bioMEMS ⓘ
integrated circuits ⓘ
microfluidics ⓘ
nanomaterials ⓘ
photonics ⓘ
power electronics ⓘ
semiconductor devices ⓘ
sensors ⓘ
servesCommunity MIT researchers ⓘ
MIT students ⓘ
industry collaborators ⓘ
supportsActivity graduate education ⓘ
research ⓘ
teaching ⓘ
undergraduate education ⓘ
supportsProcess etching ⓘ
lithography ⓘ
metrology ⓘ
packaging ⓘ
thin-film deposition ⓘ

How these facts were elicited

Referenced by (1)

Full triples — surface form annotated when it differs from this entity's canonical label.