MTL

E419436

MTL is a research and teaching facility at MIT focused on micro- and nanotechnology, including microelectronics, MEMS, and related advanced fabrication.

All labels observed (1)

Label Occurrences
MTL canonical 1

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Statements (49)

Predicate Object
instanceOf academic research center
research laboratory
teaching facility
acronymFor Microsystems Technology Laboratories
affiliatedWith Massachusetts Institute of Technology
associatedWithDepartment Department of Electrical Engineering and Computer Science
surface form: MIT Department of Electrical Engineering and Computer Science

MIT Department of Materials Science and Engineering
MIT Department of Mechanical Engineering
country United States of America
surface form: United States
field applied physics
electrical engineering
materials science
focusesOn MEMS
advanced fabrication
microelectronics
microtechnology
nanotechnology
fullName MIT Microsystems Technology Laboratories
goal advance micro- and nanoscale engineering
enable interdisciplinary microsystems research
hasFacilityType shared experimental facility
user facility
locatedIn Cambridge, Massachusetts
provides cleanroom facilities
device characterization facilities
microfabrication tools
nanofabrication tools
researchArea RF and microwave devices
actuators
bioMEMS
integrated circuits
microfluidics
nanomaterials
photonics
power electronics
semiconductor devices
sensors
servesCommunity MIT researchers
MIT students
industry collaborators
supportsActivity graduate education
research
teaching
undergraduate education
supportsProcess etching
lithography
metrology
packaging
thin-film deposition

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Referenced by (1)

Full triples — surface form annotated when it differs from this entity's canonical label.