MIT Microsystems Technology Laboratories

E313798

MIT Microsystems Technology Laboratories is a research center at the Massachusetts Institute of Technology focused on advancing micro- and nanoscale technologies, including microelectronics, MEMS, and related microsystems.

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MIT Microsystems Technology Laboratories canonical 2

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Predicate Object
instanceOf academic research laboratory
research center
affiliatedWith Massachusetts Institute of Technology
collaboratesWith Department of Electrical Engineering and Computer Science
surface form: MIT Department of Electrical Engineering and Computer Science

MIT Department of Materials Science and Engineering
MIT Department of Mechanical Engineering
country United States of America
surface form: United States
fieldOfResearch MEMS
VLSI
actuators
integrated circuits
microelectromechanical systems
microelectronics
microfabrication
microsystems
microsystems integration
nanofabrication
nanoscale technologies
nanotechnology
optoelectronics
photonics
semiconductor devices
sensors
focusesOn advancing micro- and nanoscale technologies
development of related microsystems
research in microelectronics and MEMS
hasLanguage English
locatedIn Massachusetts Institute of Technology
locatedInCity Cambridge, Massachusetts
locatedInState Massachusetts
locatedOnCampus MIT campus
operatesAs interdisciplinary research laboratory
partOf MIT School of Engineering
researchArea RF and high-frequency microsystems
advanced lithography
bio-microsystems
device fabrication
energy-efficient microsystems
heterogeneous integration
micro- and nano-actuators
micro- and nano-sensors
microsystem design
nanodevices
process technology
system-on-chip technologies
thin-film technologies
sector higher education

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Full triples — surface form annotated when it differs from this entity's canonical label.

MIT laboratories hasPart MIT Microsystems Technology Laboratories
MTL fullName MIT Microsystems Technology Laboratories