Microsystems Technology Laboratories
E88216
Microsystems Technology Laboratories is a leading MIT research facility focused on micro- and nano-scale engineering, including microelectronics, MEMS, and related technologies.
Statements (47)
| Predicate | Object |
|---|---|
| instanceOf |
MIT research facility
ⓘ
research laboratory ⓘ |
| affiliation | Massachusetts Institute of Technology ⓘ |
| country |
United States of America
ⓘ
surface form:
United States
|
| fieldOfWork |
ASME Microelectromechanical Engineering Division
ⓘ
surface form:
MEMS
RF and microwave devices ⓘ VLSI technology ⓘ actuators ⓘ integrated circuit fabrication ⓘ microelectromechanical systems ⓘ microelectronics ⓘ microfabrication ⓘ microfluidics ⓘ microsystems engineering ⓘ nanoelectronics ⓘ nanofabrication ⓘ nanotechnology ⓘ optoelectronics ⓘ photonics ⓘ power electronics ⓘ semiconductor devices ⓘ sensors ⓘ |
| languageOfWork | English ⓘ |
| locatedIn | Cambridge, Massachusetts ⓘ |
| locatedOnCampusOf | Massachusetts Institute of Technology ⓘ |
| operatedBy | Massachusetts Institute of Technology ⓘ |
| parentOrganization |
MIT School of Engineering
ⓘ
surface form:
Massachusetts Institute of Technology School of Engineering
|
| provides |
cleanroom access
ⓘ
device characterization facilities ⓘ micro- and nano-fabrication tools ⓘ shared fabrication facilities ⓘ |
| researchFocus |
MEMS sensors and actuators
ⓘ
advanced semiconductor processing ⓘ emerging electronic devices ⓘ heterogeneous integration ⓘ integrated microsystems ⓘ materials for microelectronics ⓘ micro- and nano-fabrication process development ⓘ micro-scale engineering ⓘ nano-scale engineering ⓘ nanostructured materials ⓘ system-on-chip technologies ⓘ |
| sector | academic research ⓘ |
| shortName | MTL ⓘ |
| supports |
MIT faculty research
ⓘ
MIT graduate student research ⓘ MIT undergraduate research ⓘ |
Referenced by (1)
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