Triple

T38641125
Position Surface form Disambiguated ID Type / Status
Subject TSMC N7P E938596 entity
Predicate usesEUV P191471 FINISHED
Object no LITERAL FINISHED

Provenance (4 batches)

Stage Batch ID Job type Status
creating batch_69f76ed948ec81908ce7811608a8f359 elicitation completed
NER batch_69fcdfbc71c481908ba7f87907b17782 ner completed
PD batch_69fcdbe580b8819087f143596b2c79c0 pd completed
PDg batch_69fcdfbafbf48190abe38ec0003a6419 pdg completed
Created at: May 3, 2026, 4:32 p.m.