Triple

T31733313
Position Surface form Disambiguated ID Type / Status
Subject CMOS technology E809918 entity
Predicate fabricationUses P1272 FINISHED
Object chemical–mechanical polishing LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69f348e0e4908190a884582eca646fb7 elicitation completed
NER batch_69f6aca86f188190b6835ac7046a79cd ner completed
Created at: April 30, 2026, 11:22 p.m.