Triple
T31733313
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | CMOS technology |
E809918
|
entity |
| Predicate | fabricationUses |
P1272
|
FINISHED |
| Object | chemical–mechanical polishing |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f348e0e4908190a884582eca646fb7 |
elicitation | completed |
| NER | batch_69f6aca86f188190b6835ac7046a79cd |
ner | completed |
Created at: April 30, 2026, 11:22 p.m.