Triple

T31733308
Position Surface form Disambiguated ID Type / Status
Subject CMOS technology E809918 entity
Predicate fabricationUses P1272 FINISHED
Object silicon wafers LITERAL FINISHED

Provenance (3 batches)

Stage Batch ID Job type Status
creating batch_69f348e0e4908190a884582eca646fb7 elicitation completed
NER batch_69f6ab2198c881908cc01f933f2b870b ner completed
PD batch_69f6aa20a1588190a53533fc9764efb2 pd completed
Created at: April 30, 2026, 11:22 p.m.