Triple
T28731163
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV mask |
E730663
|
entity |
| Predicate | hasFeature |
P182
|
FINISHED |
| Object | defect sensitivity at multilayer and absorber levels |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f043eae0908190b28ce314686247d7 |
elicitation | completed |
| NER | batch_69f657680a108190a4de62c3fb6a8800 |
ner | completed |
Created at: April 28, 2026, 5:58 a.m.