Triple
T28731145
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV mask |
E730663
|
entity |
| Predicate | hasSubstrateMaterial |
P55347
|
FINISHED |
| Object | ultra-low thermal expansion glass |
—
|
LITERAL FINISHED |
Provenance (3 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f043eae0908190b28ce314686247d7 |
elicitation | completed |
| NER | batch_69fd4d1854988190be093b103a681798 |
ner | completed |
| PD | batch_69fd4c8d1a188190897c24527337814a |
pd | completed |
Created at: April 28, 2026, 5:58 a.m.