Triple
T28731141
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV mask |
E730663
|
entity |
| Predicate | operatesAtWavelength |
P45250
|
FINISHED |
| Object | 13.5 nm |
—
|
LITERAL FINISHED |
Provenance (3 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f043eae0908190b28ce314686247d7 |
elicitation | completed |
| NER | batch_69febce5877c8190a5e000ef5331ec88 |
ner | completed |
| PD | batch_69febad1cd588190abc7686bcb39a371 |
pd | completed |
Created at: April 28, 2026, 5:58 a.m.