Triple
T28731129
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV pellicle |
E730662
|
entity |
| Predicate | impact |
P9
|
FINISHED |
| Object | reduces risk of printable defects from particles |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f043eae0908190b28ce314686247d7 |
elicitation | completed |
| NER | batch_69f657680a108190a4de62c3fb6a8800 |
ner | completed |
Created at: April 28, 2026, 5:58 a.m.