Triple
T28731113
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV pellicle |
E730662
|
entity |
| Predicate | materialRequirement |
P169967
|
FINISHED |
| Object | low outgassing in vacuum |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f043eae0908190b28ce314686247d7 |
elicitation | completed |
| NER | batch_69f68b7fadd88190a17b92b09ddb6f11 |
ner | completed |
Created at: April 28, 2026, 5:58 a.m.