Triple
T28731111
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | EUV pellicle |
E730662
|
entity |
| Predicate | materialRequirement |
P169967
|
FINISHED |
| Object | high melting point |
—
|
LITERAL FINISHED |
Provenance (4 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f043eae0908190b28ce314686247d7 |
elicitation | completed |
| NER | batch_69f688d015908190ad5df37030ecf332 |
ner | completed |
| PD | batch_69f68609c0b08190a8e1238a4d97c270 |
pd | completed |
| PDg | batch_69f688034580819086a0f9100645f8ba |
pdg | completed |
Created at: April 28, 2026, 5:58 a.m.