Triple

T36643418
Position Surface form Disambiguated ID Type / Status
Subject VIA C3 E904639 entity
Predicate processTechnology P2086 FINISHED
Object various processes from 0.18 µm to 0.13 µm (depending on core) LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69f76e6d3a3c81909db73eda9e0516bd elicitation completed
NER batch_69f7c4dd4e2081909db5cc375163d665 ner completed
Created at: May 3, 2026, 4:11 p.m.