Triple

T35825040
Position Surface form Disambiguated ID Type / Status
Subject Department of Microsystems Engineering, University of Freiburg E1035615 entity
Predicate focus P31 FINISHED
Object integration of micro- and nanoscale components into systems LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69f76e185ffc8190880b3cdf51decd38 elicitation completed
NER batch_69f7a902f7a481909819b583bccd4c8f ner completed
Created at: May 3, 2026, 4:06 p.m.