Triple

T3518533
Position Surface form Disambiguated ID Type / Status
Subject VLSI technology E74364 entity
Predicate basedOn P98 FINISHED
Object semiconductor fabrication LITERAL FINISHED
Provenance (2 batches)
Stage Batch ID Job type Status
creating batch_69ad85cfb5c881909c9a2edd9d6043cc elicitation completed
NER batch_69adbc49dea88190924c8abd29aabdad ner completed
Created at: March 8, 2026, 3:19 p.m.

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