Triple

T3504095
Position Surface form Disambiguated ID Type / Status
Subject Jay Last E74033 entity
Predicate notableFor P22 FINISHED
Object early use of photolithography in semiconductor manufacturing LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69ad85ce7a9c81909ddc5cf0cb67a6e3 elicitation completed
NER batch_69adbbf22b1c8190956141d8fb924210 ner completed
Created at: March 8, 2026, 3:18 p.m.