Triple
T32987913
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | Semiconductor Systems |
E843997
|
entity |
| Predicate | supportsProcessStep |
—
|
GENERATED |
| Object | inspection and metrology |
—
|
UNRECOGNIZED GENERATED |
Provenance (1 batch)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69f3494c6f9c8190a255409fce8b1d3b |
elicitation | completed |
Created at: May 1, 2026, 1:22 a.m.