Triple

T27202192
Position Surface form Disambiguated ID Type / Status
Subject CMEMS – Center for MicroElectroMechanical Systems E683763 entity
Predicate mission P68 FINISHED
Object to conduct research and development in micro- and nano-scale electromechanical systems and related materials and technologies LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69eefad1fd5c8190a4a46ea6afe58bfa elicitation completed
NER batch_69f625e234f88190bbccd01b44eacb50 ner completed
Created at: April 27, 2026, 9:36 a.m.