Triple
T24445422
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | Tokyo Electron |
E616388
|
entity |
| Predicate | coreTechnologyDomain |
P107761
|
FINISHED |
| Object | microfabrication |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69e2d7edca608190aafefc8877a1b4da |
elicitation | completed |
| NER | batch_69f2a6d73e208190873ab97996fd6b28 |
ner | completed |
Created at: April 18, 2026, 2:17 a.m.