Triple
T24445421
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | Tokyo Electron |
E616388
|
entity |
| Predicate | coreTechnologyDomain |
P107761
|
FINISHED |
| Object | semiconductor manufacturing process |
—
|
LITERAL FINISHED |
Provenance (3 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69e2d7edca608190aafefc8877a1b4da |
elicitation | completed |
| NER | batch_69f29852c6908190ab5186cee3693625 |
ner | completed |
| PD | batch_69f287d3237c819099559c00f83131d8 |
pd | completed |
Created at: April 18, 2026, 2:17 a.m.