Triple

T24445404
Position Surface form Disambiguated ID Type / Status
Subject Tokyo Electron E616388 entity
Predicate product P490 FINISHED
Object semiconductor production equipment LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69e2d7edca608190aafefc8877a1b4da elicitation completed
NER batch_69f29852c6908190ab5186cee3693625 ner completed
Created at: April 18, 2026, 2:17 a.m.