Triple

T24445383
Position Surface form Disambiguated ID Type / Status
Subject Lam Research Corporation E616387 entity
Predicate focusesOn P31 FINISHED
Object advanced process technology for semiconductor fabrication LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69e2d7edca608190aafefc8877a1b4da elicitation completed
NER batch_69f29852c6908190ab5186cee3693625 ner completed
Created at: April 18, 2026, 2:17 a.m.