Triple
T24445367
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | Lam Research Corporation |
E616387
|
entity |
| Predicate | products |
P3585
|
FINISHED |
| Object | plasma etch systems |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69e2d7edca608190aafefc8877a1b4da |
elicitation | completed |
| NER | batch_69f29852c6908190ab5186cee3693625 |
ner | completed |
Created at: April 18, 2026, 2:17 a.m.