Triple
T211086
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | AVS Science and Technology of Materials, Interfaces, and Processing |
E4718
|
entity |
| Predicate | relatedTo |
P37
|
FINISHED |
| Object | semiconductor processing |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69a2575cb1dc8190a01ad332426dc339 |
elicitation | completed |
| NER | batch_69a25c2fd0648190bae9191a84129709 |
ner | completed |
Created at: Feb. 28, 2026, 2:52 a.m.