Triple
T1775109
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | TSMC |
E38958
|
entity |
| Predicate | usesTechnology |
P1485
|
FINISHED |
| Object | extreme ultraviolet lithography |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69a8862e61708190af97b9838cc3f5de |
elicitation | completed |
| NER | batch_69aa64b6c4a88190ab2f75c8d4814f11 |
ner | completed |
Created at: March 4, 2026, 7:31 p.m.