Triple
T1079981
| Position | Surface form | Disambiguated ID | Type / Status |
|---|---|---|---|
| Subject | Semiconductor Equipment & Materials |
E23923
|
entity |
| Predicate | includesSubsegment |
P21666
|
FINISHED |
| Object | substrates and wafers |
—
|
LITERAL FINISHED |
Provenance (2 batches)
| Stage | Batch ID | Job type | Status |
|---|---|---|---|
| creating | batch_69a493f1ddf48190a99d54b00e99f8ce |
elicitation | completed |
| NER | batch_69a4bb74b0908190be51a7141e661d3e |
ner | completed |
Created at: March 1, 2026, 7:42 p.m.