Triple

T1079943
Position Surface form Disambiguated ID Type / Status
Subject Semiconductor Equipment & Materials E23923 entity
Predicate provides P490 FINISHED
Object raw materials for semiconductor fabrication LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69a493f1ddf48190a99d54b00e99f8ce elicitation completed
NER batch_69a4b94509d08190964509ea4a2d7912 ner completed
Created at: March 1, 2026, 7:42 p.m.