Triple

T10156404
Position Surface form Disambiguated ID Type / Status
Subject Applied Materials E233786 entity
Predicate keyProductArea P46323 FINISHED
Object etch equipment LITERAL FINISHED

Provenance (2 batches)

Stage Batch ID Job type Status
creating batch_69ca848e80748190b91d1e04d35512c7 elicitation completed
NER batch_69cdec3c47dc81909679903e6024eb49 ner completed
Created at: March 30, 2026, 9:09 p.m.