ESCA (Electron Spectroscopy for Chemical Analysis)

E681655

ESCA (Electron Spectroscopy for Chemical Analysis) is a surface-sensitive analytical technique, also known as X-ray photoelectron spectroscopy (XPS), used to determine the elemental composition and chemical states of materials.

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Surface form Occurrences
ESCA 0

Statements (50)

Predicate Object
instanceOf X-ray photoelectron spectroscopy technique
electron spectroscopy method
surface-sensitive analytical technique
abbreviationFor Electron Spectroscopy for Chemical Analysis NERFINISHED
alsoKnownAs X-ray photoelectron spectroscopy
analysisMode high-resolution core-level scan
survey scan
basedOnPhysicalEffect photoelectric effect
canDetect all elements except hydrogen and helium
canDistinguish different chemical states of the same element
canMap lateral distribution of elements on surfaces
canPerform depth profiling with ion sputtering
canQuantify atomic concentration of elements
commonlyUsedFor adhesion and interface studies
catalyst surface analysis
characterization of thin films and coatings
corrosion studies
polymer surface characterization
semiconductor device characterization
surface analysis of solids
dataOutput intensity versus binding energy plot
photoelectron spectrum
detects photoelectrons emitted from a sample
developedBy Kai Siegbahn NERFINISHED
developmentPeriod 1960s
energyScale binding energy in electronvolts
excitationSource Al Kα X-rays
Mg Kα X-rays
monochromatic X-ray source
fullName Electron Spectroscopy for Chemical Analysis NERFINISHED
isSurfaceSensitive true
limitation limited sensitivity to light elements like hydrogen
requires vacuum-compatible samples
measures binding energies of core-level electrons
chemical states of elements
elemental composition of material surfaces
oftenCalibratedUsing C 1s peak of adventitious carbon
providesInformationOn chemical bonding environment
oxidation states
surface contamination
thin film composition
relatedTechnique Auger electron spectroscopy NERFINISHED
secondary ion mass spectrometry
ultraviolet photoelectron spectroscopy
requires ultra-high vacuum conditions
requiresCalibrationWith reference binding energies
spatialResolution typically tens of micrometers
typicalAnalysisDepth 1–10 nanometers
typicalPressureRange 10^-9 to 10^-7 mbar
usesRadiationType X-rays

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Kai Siegbahn developed ESCA (Electron Spectroscopy for Chemical Analysis)